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閲戝墰鐭冲垁鍏�
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2銆丳CD閲戝墰鐭冲垁鍏凤細
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3銆丆VD閲戝墰鐭冲垁鍏凤細
CVD閲戝墰鐭充篃鏄汉宸ュ悎鎴愮殑锛屽湪20涓栫磤(j矛)70骞翠唬鑷�80骞翠唬涔嬮枔鍑虹従(xi脿n)锛屾槸鏃ユ湰鐮旂櫦(f膩)鍑轰締(l谩i)鐨勩€� CVD閲戝墰鐭虫槸鎸囩敤鍖栧(xu茅)姘ｇ浉娌夌⿳娉�/(CVD/)鍦ㄧ暟璩�(zh矛)鍩洪珨/(濡傜‖璩�(zh矛)鍚堥噾銆侀櫠鐡风瓑/)涓婂悎鎴愰噾鍓涚煶鑶�锛孋VD閲戝墰鐭宠垏澶╃劧閲戝墰鐭崇殑鐗规€у咕涔庝竴妯ｏ紝閲囩敤CVD閲戝墰鐭虫潗鏂欏埗閫犲嚭渚�(l谩i)鐨勫垁鍏�锛屽彲鍫ū瀹岀編锛屽畠鍚屾檪(sh铆)鍏锋湁澶╃劧閲戝墰鐭冲拰鑱氭櫠閲戝墰鐭崇殑鍎�(y艒u)榛�(di菐n)銆�
